| 摘要 |
Embodiments of the invention include aerosol impactors comprising one or more micromechanical resonators. Impactors according to embodiments of the invention can provide size classification and/or concentration of aerosol particulate. Aerosol impactors can use an air flow device, such as a pump, to create a constant flow of air. Nozzles of varying diameters are used to separate particulate of varying sizes and the particles that pass through strike a measuring device. MEMS resonators can be integrated into arrays to provide mass sensitivity in a small, lightweight and cost effective package, which will effectively allow for the measurement of the mass of every micro/nanoscale particle landing on the surface. |
