发明名称 |
CHEMICAL SENSORS WITH CONSISTENT SENSOR SURFACE AREAS |
摘要 |
<p>In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.</p> |
申请公布号 |
WO2014149778(A1) |
申请公布日期 |
2014.09.25 |
申请号 |
WO2014US20887 |
申请日期 |
2014.03.05 |
申请人 |
LIFE TECHNOLOGIES CORPORATION |
发明人 |
FIFE, KEITH;OWENS, JORDAN;LI, SHIFENG;BUSTILLO, JAMES |
分类号 |
G01N27/414 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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