| 摘要 |
<p>[Problem] To avert stiction of a display device having a MEMS shutter. [Means of Solution] A display device containing a plurality of pixels each having a switching element and a MEMS shutter driven by the switching element, arranged in a matrix on a first substrate, and having an anti-stiction coating formed by means of compounds represented by formula (I) condensing with each other and chemically bonding with at least part of the MEMS shutter surface. (Here, R1in formula (I) is a monovalent organic group, X1 is a hydrolysable group, and X2 is a monovalent organic group or a hydrolysable group.</p> |
