发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking device and sticking method capable of preventing a device from being enlarged.SOLUTION: A sheet sticking device 1 includes: a sticking means 3 for sticking an adhesive sheet AS to an adherend WF; a cutting means 5 for cutting the adhesive sheet AS stuck to the adherend WF; and a guiding means 6 for guiding the cutting means 5 in a predetermined direction. The guiding means 6 includes: a rail 61C which is laid in an annular shape with a predetermined position as a center circle RC; and a rotor 62 which supports the cutting means 5 and is rotatably provided along the rail 61C with the circle center RC of the rail 61C as a rotation center. The rotor 62 is provided so that a torque can be given to a position deviated to the rail 61C side from the position of the circle center RC of the rail 61C.
申请公布号 JP2014179521(A) 申请公布日期 2014.09.25
申请号 JP20130053476 申请日期 2013.03.15
申请人 LINTEC CORP 发明人 TAKANO TAKESHI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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