发明名称 METHOD FOR FORMING PHOTORESIST EDGE BURR AND METHOD FOR MANUFACTURING ARRAY SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a photoresist edge burr and a method for manufacturing an array substrate.SOLUTION: A method for manufacturing an array substrate comprises the steps of: forming a gate line and a gate electrode pattern on a substrate; forming a data line, a source electrode, a drain electrode, and a TFT channel region pattern without removing a photoresist, depositing a passivation layer, and removing the remained photoresist and the passivation layer thereon by a lifting-off process; applying the photoresist, forming a peak shape edge burr on the photoresist, depositing a transparent conductive film, and forming a pixel electrode pattern which is directly connected with the drain electrode by the lifting-off process.
申请公布号 JP2014179620(A) 申请公布日期 2014.09.25
申请号 JP20140061495 申请日期 2014.03.25
申请人 BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO LTD;BOE TECHNOLOGY GROUP CO LTD 发明人 ZHENG YUNYOU;JUNG JAE YUN;HOU ZHI;LIU ZUHONG;RHEE JEONG HUN
分类号 H01L21/027;G02F1/1368;H01L21/3065 主分类号 H01L21/027
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