| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic wave sensor including a piezoelectric vibrator comprising a lithium niobate (LN) single crystal, capable of generating ultrasonic waves at high output and being used in a high temperature range, and preventing a crack in the crystal from being generated.SOLUTION: A piezoelectric vibrator 1 has an output surface that is a surface (a cut surface at a Y-axis 36°) obtained by rotating a surface orthogonal to the Y-axis of the crystal of LN around an X-axis by 36°±2°. An ultrasonic wave sensor includes a delay material 3 comprising titanium, and a connection layer 2 connecting one surface of the delay material 3 to the output surface. The connection layer 2 comprises silver and frit glass, and a linear expansion coefficient of the frit grass is in a range of 5×10/K to 15×10/K.</p> |
