Inspection System Including Parallel Imaging Paths with Multiple and Selectable Spectral Bands

摘要

The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.

主权项

1. A system for inspecting a sample with multiple wavelengths of illumination, comprising:
one or more illumination sources configured to illuminate at least a portion of a surface of a sample simultaneously with at least a first wavelength of illumination and a second wavelength of illumination, the second wavelength of illumination being different from the first wavelength of illumination; a first detector configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination; a second detector configured to detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample in response to the second wavelength of illumination; and a computing system communicatively coupled with the first detector and the second detector, the computing system being configured to: receive imaging data from the first detector and imaging data from the second detector; and compare the imaging data received from the first detector and the imaging data received from the second detector to differentiate a portion of the imaging data received from the first detector and the imaging data received from the second detector that is attributable to nuisance from a portion of the imaging data received from the first detector and the imaging data received from the second detector that is attributable to a sample defect of interest.