摘要 |
A method of fabricating a passivation layer and a passivation layer for an electronic device. The passivation layer includes at least one passivation film layer and at least one nanoparticle layer. A first film layer is formed of an insulating matrix, such as aluminum oxide (Al2O3) and a first layer of a noble metal nanoparticle layer, such as a platinum nanoparticle layer, is deposited on the first film layer. Additional layers are formed of alternating film layers and nanoparticle layers. The resulting passivation layer provides a thin and robust passivation layer of high film quality to protect electronic devices, components, and systems from the disruptive environmental conditions. |
申请人 |
ROBERT BOSCH GMBH;FEYH, ANDO;PURKL, FABIAN;GRAHAM, ANDREW;YAMA, GARY |
发明人 |
FEYH, ANDO;PURKL, FABIAN;GRAHAM, ANDREW;YAMA, GARY |