发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sticking device which can prevent such a problem that gas is drawn between an adhesive sheet and an adherend, and can surely stick the adhesive sheet to the adherend.SOLUTION: The sheet sticking device which sticks an adhesive sheet AS to an adherend WF includes: sealed space forming means 20 which forms a sealed space CE so as to include an elastic member 24 that can bend toward an adherend side; first pressurizing means 30 which entirely applies external force to the elastic member by changing inner pressure of the sealed space, and pressurizes and sticks the adhesive sheet arranged between the elastic member and the adherend to the adherend through the elastic member; and second pressurizing means 40 which partially applies external force to the elastic member, and pressurizes and sticks the adhesive sheet stuck to the adherend to the adherend again through the elastic member.
申请公布号 JP2014179441(A) 申请公布日期 2014.09.25
申请号 JP20130052095 申请日期 2013.03.14
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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