发明名称 |
METHOD OF FORMING FILM, METHOD OF MANUFACTURING ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT MANUFACTURED BY MANUFACTURING METHOD, DROPLET EJECTION HEAD, DROPLET EJECTION DEVICE AND IMAGE FORMING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a film capable of suppressing variation in the film thickness when forming a film by applying a coating liquid, and to provide a method of manufacturing an electromechanical conversion element, an electromechanical conversion element manufactured by the manufacturing method, a droplet ejection head and a droplet ejection device, and a droplet ejection head and a droplet ejection device for use in the manufacturing method.SOLUTION: In the way of repetition of film formation process, the thickness of a film is measured, and the coating conditions of coating liquid in the remaining process for forming a film are changed based on the measurement results of the thickness of a film. When performing the remaining process for forming a film, coating of the coating liquid is controlled based on the coating conditions thus changed. |
申请公布号 |
JP2014179501(A) |
申请公布日期 |
2014.09.25 |
申请号 |
JP20130053216 |
申请日期 |
2013.03.15 |
申请人 |
RICOH CO LTD |
发明人 |
MACHIDA OSAMU;SHIMOFUKU HIKARI;TAKEUCHI JUN |
分类号 |
H01L41/318;B41J2/045;B41J2/055;B41J2/16;H01L21/316;H01L41/09 |
主分类号 |
H01L41/318 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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