发明名称 METHOD OF FORMING FILM, METHOD OF MANUFACTURING ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT MANUFACTURED BY MANUFACTURING METHOD, DROPLET EJECTION HEAD, DROPLET EJECTION DEVICE AND IMAGE FORMING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a film capable of suppressing variation in the film thickness when forming a film by applying a coating liquid, and to provide a method of manufacturing an electromechanical conversion element, an electromechanical conversion element manufactured by the manufacturing method, a droplet ejection head and a droplet ejection device, and a droplet ejection head and a droplet ejection device for use in the manufacturing method.SOLUTION: In the way of repetition of film formation process, the thickness of a film is measured, and the coating conditions of coating liquid in the remaining process for forming a film are changed based on the measurement results of the thickness of a film. When performing the remaining process for forming a film, coating of the coating liquid is controlled based on the coating conditions thus changed.
申请公布号 JP2014179501(A) 申请公布日期 2014.09.25
申请号 JP20130053216 申请日期 2013.03.15
申请人 RICOH CO LTD 发明人 MACHIDA OSAMU;SHIMOFUKU HIKARI;TAKEUCHI JUN
分类号 H01L41/318;B41J2/045;B41J2/055;B41J2/16;H01L21/316;H01L41/09 主分类号 H01L41/318
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