| 摘要 |
The invention relates to a micromechanical sensor device and a corresponding production method. The micromechanical sensor device comprises a substrate (1) having a front (VS) and a rear (RS), a plurality of pillars (S1, S2) being formed on the front (V) of the substrate (1). On each pillar a respective sensor element (P1, P2) is formed, which has a greater lateral extent than the associated pillar (S1, S2), a cavity (H) being provided laterally to the pillars (S1, S2) beneath the sensor elements (P1, P2). The sensor elements (P1, P2) are laterally spaced apart from each other by means of respective separating troughs (G1, G2) and make electrical contact with a respective associated rear contact (V6, E1; V7, E1) via the respective associated pillar (S1, S2). |
