<p>An induction heating apparatus includes a susceptor defining a reaction chamber. A housing is spaced from the susceptor opposite the reaction chamber and defines a port. A void space is defined between the housing and the susceptor. An induction coil extends through the port and is disposed within the void space for conducting an electric current to heat the susceptor to heat the reaction chamber. A flange comprises a metal material and is coupled to the housing at the port for sealing the port with the induction coil extending through the flange. An isolator is disposed between the flange and the housing to prevent the electric current from passing into the housing.</p>
申请公布号
WO2014150213(A1)
申请公布日期
2014.09.25
申请号
WO2014US22596
申请日期
2014.03.10
申请人
HEMLOCK SEMICONDUCTOR CORPORATION
发明人
ARMSTRONG, TIMOTHY;DEEG, MATTHEW;LARIMER, JENNIFER;LARSON, WILLIAM;MCCOY, KEITH;MOLNAR, MICHAEL, JOHN;SCHULTZ, JAMES, A.