发明名称 PRINTING PHOSPHOR ON LED WAFER USING DRY FILM LITHOGRAPHY
摘要 <p>A method for depositing a layer of phosphor-containing material on a plurality of LED (light-emitting diode) dies on a wafer includes disposing a layer of dry photoresist film over a plurality of LED dies on a wafer, disposing a mask layer over the dry photoresist film, and patterning the dry photoresist film to form a plurality of openings in the dry photoresist film to expose a top surface of each of the LED dies. The method also includes depositing a phosphor-containing material on the exposed top surface of each the LED dies using a screen printing process, and removing the patterned dry photoresist film.</p>
申请公布号 WO2014150263(A1) 申请公布日期 2014.09.25
申请号 WO2014US22745 申请日期 2014.03.10
申请人 LEDENGIN, INC. 发明人 MEI, ZEQUN;YAN, XIANTAO
分类号 H01L33/48 主分类号 H01L33/48
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