发明名称 |
REVERSAL UNIT AND SUBSTRATE TRANSFERRING DEVICE USING THIS |
摘要 |
<p>A reversal unit, a substrate transferring apparatus, and a substrate transferring method are disclosed. The disclosed reversal unit comprises: a reversal supporting unit which supports a substrate by attaching and supporting; a reversal shaft unit fixated in the reversal supporting unit; and a reversal driving unit which rotates the reversal shaft unit either forwards or backwards.</p> |
申请公布号 |
KR101441976(B1) |
申请公布日期 |
2014.09.25 |
申请号 |
KR20130032903 |
申请日期 |
2013.03.27 |
申请人 |
ZEUS CO., LTD. |
发明人 |
LEE, JOO SECK;KIM, JONG BACK;HAN, SANG EI;YOO, DAE YEON;CHUNG, TAE HOON |
分类号 |
H01L21/677;B25J9/04;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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