发明名称 |
VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION |
摘要 |
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair. |
申请公布号 |
EP2780489(A1) |
申请公布日期 |
2014.09.24 |
申请号 |
EP20120787623 |
申请日期 |
2012.11.07 |
申请人 |
FIRST SOLAR, INC |
发明人 |
BARDEN, JOHN;POWELL, RICK, C. |
分类号 |
C23C14/24;C03C17/00;C23C14/22;C23C14/56;H01L31/18 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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