THERMAL TREATMENT SYSTEM AND METHOD OF PERFORMING THERMAL TREATMENT AND METHOD OF MANUFACTURING CIGS SOLAR CELL USING THE SAME

摘要

The present invention relates to a thermal treatment system, a thermal treatment method, and a manufacturing method of a CIGS solar cell using the same. The thermal treatment system comprises; a reaction chamber including a reaction space; an external chamber which is separated from the reaction chamber at predetermined intervals and surrounds the reaction chamber; a door chamber which opens and closes the reaction space of the reaction chamber; and an air flow control device for circulating an air flow in the reaction space of the reaction chamber. The air flow control device comprises; a driving shaft; an air flow absorption unit connected to the driving shaft; and an air flow discharge unit connected to the air flow absorption unit. The air flow in the reaction space is absorbed in the air flow absorption unit by the drive of the driving shaft and is discharged through the air flow discharge unit and is circulated in the reaction space. According to the present invention, the uniform temperature distribution and concentration distribution of uniform reaction gas are formed in the whole reaction space by circulating the air flow inside the reaction space of the reaction chamber after operating the air flow control device.