| 摘要 |
<p>Form measuring instrument includes: first measuring means which moves contact piece from first position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain first profile; second placing means which rotates workpiece about first axis by 90 degrees to place workpiece at second position from first position; second measuring means which moves contact piece from second position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain second profile; extremum position calculating means which fits circles to first and second profiles and calculate positions, in direction parallel with second axis, of first and second extremums indicating circles' extremums; and moving means which moves workpiece in direction parallel with second axis and direction parallel with third axis such that positions, in direction parallel with second axis, of first and second extremums become 0.</p> |
