发明名称 ORGANIC DEVICE MANUFACTURING METHOD, ORGANIC DEVICE MANUFACTURING APPARATUS AND ORGANIC DEVICE
摘要 Moisture is restrained from infiltrating into organic electro luminescence (EL) element. A method for manufacturing an organic device comprises a process of carrying a substrate where an interlayer is formed on one or more barrier ribs and a first sealing layer sealing an organic layer on both electrodes, and a process of etchbacking the interlayer formed on the substrate. The process of etchbacking features that at least a part of the first sealing layer on at least one barrier rib out of the one or more barrier ribs is processed until being exposed starting from the interlayer to the extent of being able to contact with a second sealing layer film-formed in the next process.
申请公布号 KR20140113386(A) 申请公布日期 2014.09.24
申请号 KR20140027909 申请日期 2014.03.10
申请人 TOKYO ELECTRON LIMITED 发明人 ISHIKAWA HIRAKU;HAYASHI TERUYUKI
分类号 H01L27/32 主分类号 H01L27/32
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