发明名称 SUBSTRATE ABSORPTION DEVICE
摘要 <p>A substrate absorption device is disclosed. The disclosed substrate absorption device comprises: a hollow absorbing pipe unit, an absorbing panel unit, and a plurality of absorbing guide units. The hollow absorbing pipe unit includes an absorbing hole unit which receives absorptive power and penetrates the absorbing pipe unit. The absorbing panel unit is equipped on one end of the absorbing pipe unit, and comprises two surfaces of which one is for contact whereas the other is for non-contact. The plurality of absorbing guide units are formed in the absorbing panel unit by being intended to be connected to the absorbing hole unit.</p>
申请公布号 KR20140113619(A) 申请公布日期 2014.09.24
申请号 KR20140110568 申请日期 2014.08.25
申请人 ZEUS CO., LTD. 发明人 LEE, JOO SECK;HAN, SANG EI;CHUNG, TAE HOON
分类号 H01L21/677;B25J15/06 主分类号 H01L21/677
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