发明名称
摘要 <p>A lock device for adding and removing containers to and from a vacuum treatment chamber includes carrier plates for the containers. The carrier plates are fastened to revolving transport chains and are transported through lock channels provided in straight sections along the transport chains. The carrier plates also achieve a sealing effect with the channels as they are moved past suction or ventilation openings in the lock channels to form a differential pressure stage.</p>
申请公布号 JP5594840(B2) 申请公布日期 2014.09.24
申请号 JP20100544593 申请日期 2008.12.18
申请人 发明人
分类号 C23C16/54;B65G17/12;C23C14/56 主分类号 C23C16/54
代理机构 代理人
主权项
地址