DEPOSITION APPARATUS FOR ORGANIC-INORGANIC HYBRID THIN FILM AND METHOD FOR FABRICATING ORGANIC-INORGANIC HYBRID THIN FILM USING SAME

摘要

The present invention relates to a deposition device for an organic-inorganic hybrid thin film and a method for manufacturing an organic-inorganic hybrid thin film using the same. In the deposition device for an organic-inorganic hybrid thin film, an atomic layer deposition chamber for the deposition of inorganic matters and a thermal deposition chamber for the depositing of organic matters are vertically connected. A gate valve is arranged in a connection path connecting the chambers. An injection port for supplying an inorganic deposition source is arranged in the atomic layer deposition chamber. A unit for heating an organic deposition source is arranged in the thermal deposition chamber. In the formation of a molecular organic-inorganic thin film, the present invention can form the multi-layered physical thin film of the organic and inorganic layers using a thermal deposition method and an atomic layer deposition method and the multi-layered thin film of the organic and inorganic layers through a chemical combination on the interface of the organic and inorganic layers.