发明名称
摘要 <p>A base material film used for a dicing sheet, the dicing sheet including the base material film and a pressure-sensitive adhesive layer laminated on one surface of the base material film. The base material film includes a single layer of resin film or multiple layers of resin films, at least the resin film in contact with the pressure-sensitive adhesive layer being formed from a resin composition containing ethylene-(meth)acrylic acid copolymer as a main constituent, the resin composition further containing 0.3 to 17.0 parts by mass of an epoxy compound based on 100 parts by mass of the ethylene-(meth)acrylic acid copolymer. The dicing sheet that uses the base material film does not require application of physical energy such as an electron beam or aγ-ray, and can be reduced in dicing dust that is generated during the dicing of a cut object.</p>
申请公布号 JP5596129(B2) 申请公布日期 2014.09.24
申请号 JP20120508241 申请日期 2011.03.24
申请人 发明人
分类号 H01L21/301;C09J7/02;C09J201/00 主分类号 H01L21/301
代理机构 代理人
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