发明名称 |
SCRATCH-RESISTANT COATINGS FOR PROTECTING FRONT-SIDE CIRCUITRY DURING BACKSIDE PROCESSING |
摘要 |
Scratch-resistant coatings for protecting front-side microelectromechanical and semiconductor device features during backside processing are provided, along with methods of using the same. The coatings are non-photosensitive, removable, and tolerate high processing temperatures. These coatings also eliminate the need for a separate etch stop layer in the device design. The coatings are formed from a composition comprising a component dissolved or dispersed in a solvent system. The component is selected from the group consisting of styrene-acrylonitrile copolymers and aromatic sulfone polymers. |
申请公布号 |
EP2471090(A4) |
申请公布日期 |
2014.09.24 |
申请号 |
EP20100817743 |
申请日期 |
2010.09.15 |
申请人 |
BREWER SCIENCE, INC. |
发明人 |
YESS, KIMBERLY, A.;DAILY, MADISON, M., JR.;FLAIM, TONY, D. |
分类号 |
H01L21/48;C08J5/18;C09D125/12;H01L21/56;H01L23/29;H01L23/31 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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