| 摘要 |
Provided is a plasma tuning rod which can be used with a microwave processing system. A wave guide includes a first dielectric part having a first external diameter. A second dielectric part having a second external diameter which is larger than the first external diameter surrounds the first dielectric part. The axis of the second dielectric part can be equal to the axis of the first dielectric part. In some embodiments of the present invention, the dielectric constant of the first dielectric part can be the same as or greater than the dielectric constant of the second dielectric part. |
