发明名称 HEAT TREATMENT DEVICE
摘要 The invention relates to a heater for temperature compensation and a heat processing device using the same. The heater for temperature compensation comprises a heating unit which is divided into a heating area for radiating heat energy and a nominal area extending from two opposite end parts of the heating area; a compensation unit which is divided into a connection area and a compensation area which extends from the two opposite end parts of the connection area and radiates heat energy; and a fixing unit, where the heating unit and the compensation unit are fixed.
申请公布号 KR101441974(B1) 申请公布日期 2014.09.24
申请号 KR20120124552 申请日期 2012.11.06
申请人 发明人
分类号 H01L21/02;H05B3/02 主分类号 H01L21/02
代理机构 代理人
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