METHOD FOR MANUFACTURING A NANO WIRE

摘要

The present invention is able to improve efficiency in nanowire manufacture by providing a manufacturing method for improving the growth of a nanowire from a metal silicide. A nanowire manufacturing method of the present invention comprises: a step of preparing a substrate; a step of forming a metal layer on the substrate; a step of applying Si precursors to a laminate; and a step of growing a nanowire at a temperature of 300-400°C and a pressure of 10-60 Torr.