DETERMINING A MALFUNCTIONING DEVICE IN A PLASMA SYSTEM

摘要

Disclosed are systems and methods for determining a malfunctioning device in a plasma system. One of the methods includes a step of receiving an indication whether plasma is generated within a plasma chamber of the plasma system. The plasma system includes a processing portion and a power delivery portion. The method includes the steps of: determining whether the plasma system operates within constraints when the indication that the plasma is generated is received; determining a value of a variable at an output of the power delivery portion when the processing portion is decoupled from the power delivery portion; and comparing the determined value with a pre-recorded value of the variable. The method includes the steps of: determining whether the determined value is outside a range of the pre-recorded value; and determining that the malfunctioning device is within the power delivery portion upon determining that the determined value is outside the range of the pre-recorded value.