MEMS device and process

摘要

A MEMS comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) of the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.

主权项

1. A micro-electrical-mechanical system (MEMS) microphone comprising:
a rigid back-plate layer; a membrane layer, the membrane layer being moveable, in use, in relation to the rigid back-plate layer, the back-plate layer comprising:
an outer portion orientated on a first plane;an inner portion orientated on a second plane, wherein the inner portion is raised relative to the outer portion; anda sidewall portion orientated on a third place for connecting the inner portion and the outer portion;wherein an upper surface of the outer portion is higher than a lower surface of the inner portionand wherein the outer portion, inner portion and sidewall portion are configured such that the rigid back-plate layer comprises a fourth plane which is common to the outer portion, inner portion and sidewall portion.