Electron beam data storage system and method for high volume manufacturing

摘要

The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.

主权项

1. A method comprising:
receiving a design layout having a first pattern and a second pattern, wherein the second pattern is a repeating pattern of the first pattern; reducing a data size of the design layout, wherein the reducing includes:
creating a lookup table corresponding to the design layout using a computing system, wherein the lookup table maps the first pattern and the second pattern to a same data set based on the second pattern being a repeating pattern of the first pattern.