Method of forming vertical electronic fuse interconnect structures including a conductive cap

摘要

An electronic fuse structure including a first Mx metal comprising a conductive cap, an Mx+1 metal located above the Mx metal, wherein the Mx+1 metal does not comprise a conductive cap, and a via, wherein the via electrically connects the Mx metal to the Mx+1 metal in a vertical orientation.

主权项

1. A method of forming an electronic fuse, the method comprising:
providing an Mx level comprising a first Mx metal and a second Mx metal; forming a conductive cap directly on top of the second Mx metal, and no conductive cap being formed directly on top of the first Mx metal; depositing an Mx cap dielectric above and in direct contact with the first Mx metal, and above the second Mx metal in direct contact with the conductive cap; forming an Mx+1 level above the Mx level, the Mx+1 level comprising an Mx+1 metal; and forming a via electrically connecting the second Mx metal to the Mx+1 metal in a vertical orientation.