Measurement method and measurement device

摘要

In the measurement method, a vibrator (5) of a detection unit (4) is relatively moved against a plate (3) of which surface is flat having predetermined area. The vibrator (5) which is vibrating is moved closer to a surface of an object-to-be-measured (1) which is mounted on the plate (3) until the frequency thereof is varied. A position where the frequency of the vibrator (5) is varied is output as a contact position where the vibrator (5) is contacted to the object-to-be-measured (1). Then, thickness of the object-to-be-measured (1) is measured by comparing the position where the vibrator (5) is contacted to the object-to-be-measured (1) with a surface position of the plate (3).

主权项

1. A measurement method comprising:
moving a vibrator (5) of a detection unit (4) relatively towards a flat plate surface (3) having a predetermined area on which an object-to-be-measured is resting, wherein the object-to-be-measured comprises a main body and a raised fabric layer disposed on the main body, the raised fabric layer having a different height and a different hardness than the main body; moving the vibrator (5) which is vibrating at a particular frequency closer to a surface of the object-to-be-measured (1) which is mounted on the plate (3) until the frequency changes; outputting a first surface contact position where the frequency of the vibrator (5) changes as the vibrator (5) makes contact with a top surface of the raised fabric layer; moving the vibrator further towards the flat plate surface until the frequency changes a second time as the vibrator makes contact with a top surface of the main body; outputting a second surface contact position where the frequency of the vibrator changes the second time as the vibrator makes contact with the top surface of the main body; measuring thickness of the raised fabric layer of the object-to-be-measured by performing a discrimination process between the first surface contact position and the second contact position based on the frequency variation of the vibrator at the first and second contact positions; measuring a thickness of the main body of the object-to-be-measured (1) by comparing the second surface contact position and a surface position of the flat plate surface (3) as compared with previously-obtained vibration variation information; moving the vibrator (5) further toward the flat plate surface (3) for a predetermined distance from the second surface contact position; detecting and outputting a pressure of a reaction force created by the object-to-be-measured against the vibrator (5); measuring a hardness of the object-to-be-measured by comparing the reaction force pressure with previously-obtained hardness information; and setting or changing various conditions including a vertical movement amount of the vibrator (5), moving pressure of the vibrator (5), moving speed of the vibrator (5), and press depth of the object-to-be-measured (1) due to the vibrator (5) in accordance with the object-to-be-measured (1).