发明名称 STANDING WAVE GENERATION IN HOLES TO ENHANCE CLEANING IN THE HOLES IN LIQUID SONIFICATION CLEANING SYSTEM
摘要 Methods and liquid sonification systems are configured to clean at least one hole of an article. The methods comprise establishing at least one pressure gradient within the at least one hole to move particles proximate to a node of a standing wave toward an antinode of the standing wave, wherein the standing wave has an axis of propagation parallel to the central axis of the at least one hole. The methods may, in some embodiments, comprise establishing cavitation of one or more sites within the at least one hole.
申请公布号 KR20140112455(A) 申请公布日期 2014.09.23
申请号 KR20140029889 申请日期 2014.03.13
申请人 LAM RESEARCH CORPORATION 发明人 STUMPF JOHN F.
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
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