Seal mechanism and treatment apparatus

摘要

[Object] To provide a seal mechanism that reduces a maintenance frequency for replenishment of a lubricating material and has small friction resistance, and a treatment apparatus equipped with the seal mechanism.;[Solving Means] A lip seal (12) of a seal mechanism (100) is arranged so as to surround a drive shaft (25), and a lip portion (12b) thereof includes a seal portion (12c) that comes into contact with the drive shaft (25). A wall member (15) is attached to the drive shaft (25) so as to close a lower opening of a mounting member (30) and face the lip seal (12). By at least the mounting member (30) and the wall member (15), a container capable of accommodating a lubricating material (16) is formed. A gap (17) set such that the lubricating material (16) does not pass therethrough is provided between the wall member (15) and a holding base body (60). With such a structure, a space for accommodating the lubricating material (16) can be secured and the seal mechanism (100) and the drive shaft (25) are allowed to be in contact with each other only at the seal portion (12c) of the lip seal (12).

主权项

1. A seal mechanism comprising:
a seal member arranged at a circumference of a rotary shaft; a holding base body that is arranged at the circumference of the rotary shaft and is capable of holding the seal member to be brought into contact with the rotary shaft; a wall member to form a container together with the rotary shaft, the seal member and the holding base body; a lubricating material disposed within the container; and a cup-shaped guide member fixed to the wall member, the guide member formed to be gradually widened toward the seal member from the wall member, the wall member being attached to the rotary shaft to have a gap set such that the lubricating material does not pass therethrough between the wall member and the holding base body, the wall member including a communication path that communicates between a circumferentially inner side of the guide member and a circumferentially outer side of the guide member, wherein the seal member and the wall member seal the container between an atmospheric pressure and a vacuum, the lubricating material sealing the gap between the wall member and the holding base body.