THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE

摘要

Thermally stable multilayer mirror for the EUV spectral range In the case of a multilayer mirror (6) for EUV radiation, which contains a layer sequence (7) arranged on a substrate (3) and comprising a multiplicity of layer pairs (5) each comprising a first layer (1) composed of a first material and - applied thereon - a second layer (2) composed of a second material, according to the invention the first layers (1) and the second layers (2) each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.