PIANO MEMS WITH HIDDEN HINGE

摘要

The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. the hinge structure includes first and second hinges and a gimbal ring fabricated in a single layer beneath the platform layer. one end of the hinge structure extends from the undersurface of the platform, while the other end extends from a pedestal, which extends upwardly from a substrate.