| 主权项 |
1. A method for fabricating silicon and silicon germanium fins on a semiconductor wafer comprising a substrate, a dielectric layer formed on the substrate, and a semiconductor layer formed on the dielectric layer, the method comprising:
forming, in at least one pFET region of the semiconductor wafer, at least one SiGe fin from at least a first silicon germanium (SiGe) comprising region in the semiconductor layer; epitaxially growing strained silicon on at least a second SiGe comprising region of the semiconductor layer; forming at least one strained silicon fin from the strained silicon in at least one nFET region of the semiconductor wafer; forming a pad layer on the semiconductor layer; forming a plurality of mandrels, wherein at least a first mandrel is formed on a first portion of the pad layer over the first SiGe comprising region, and wherein at least a second mandrel is formed on at least a second portion of the pad layer over the second SiGe comprising region; depositing a spacer material over the plurality of mandrels and portions of the pad layer; removing the spacer material from horizontal surfaces of the plurality of mandrels and the portions of the pad layer, wherein the removing forms a first sidewall spacer and at least a second sidewall spacer on each of the plurality of mandrels, and wherein the removing exposes the portions of the pad layer; removing the first and second sidewall spacers from the at least second mandrel, the removing exposing portions of the pad layer under the first and second sidewall spacers; and removing the at least first mandrel selective to the first and second sidewall spacers of the at least first mandrel, the removing exposing a portion of the pad layer under the at least first mandrel,wherein forming the at least one SiGe fin comprises:
etching the exposed portions of the pad layer, wherein the second portion of the pad layer remains under the at least second mandrel, and wherein a third portion of the pad layer remains under the first sidewall spacer of the first mandrel and a fourth portion of the pad layer remains under the second sidewall spacer of the first mandrel, wherein etching the exposed portions of the pad layer exposes portions of the semiconductor layer; and after etching the exposed portions of the pad layer, removing at least the second mandrel, the first sidewall spacer of the first mandrel, and the second sidewall spacer of the first mandrel; etching the exposed regions of the semiconductor layer, wherein the etching forms the at the least one SiGe fin under the third portion of the pad layer and at least one additional SiGe fin under the fourth portion of the pad layer; and removing at least the third and fourth portions of the pad layer. |
