Semiconductor device and its manufacturing method

摘要

In an LDMOS transistor, a channel length is reduced to increase a saturation current without causing an off-state breakdown voltage optimized in terms of trade-off between an on-resistance and the off-state breakdown voltage. A short channel region is selectively formed between an element isolation film and a low-concentration body region in which a channel is formed such that the short channel region is located immediately below a gate oxide film. The short channel region has a conduction type opposite to that of the low-concentration body region and has a carrier concentration higher than that of the low-concentration body region. The body region is retreated by the presence of the short channel region toward a high-concentration source region.

主权项

1. A semiconductor device comprising:
a semiconductor substrate; and a MOS transistor of a first conduction type including a source region of the first conduction type and a drain region of the first conduction type isolated from each other by an element isolation film formed on a semiconductor layer of the first conduction type formed on a main surface of the semiconductor substrate, the MOS transistor further including: a gate oxide film and a gate electrode of a second conduction type opposite to the first conduction type, the gate oxide film and the gate electrode being formed between the source region and the element isolation film, the gate electrode having a part extending up onto the element isolation film; a body region of the second conduction type, the body region having a concentration gradient provided by diffusion from the source region, and a short channel region of the first conduction type formed on the semiconductor layer.