发明名称 |
Spatial light modulator with multiple linear arrays |
摘要 |
A system including spatial light modulators with multiple one-dimensional (1D) diffractor arrays and methods of operating the same are provided. In one embodiment, the system comprises a spatial light modulator (SLM) assembly including a plurality of one-dimensional (1D) diffractor arrays to modulate light from a light source, the plurality of 1D diffractor arrays integrally formed on a die; illumination optics disposed in a light path between the plurality of 1D diffractor arrays and the light source to illuminate a substantially linear portion of at least one of the plurality of 1D diffractor arrays; and imaging optics disposed in a light path between the SLM assembly and an image plane on a target-substrate, the imaging optics adapted to transmit modulated light from the SLM assembly to a substantially linear portion of the image plane. Other embodiments are also provided. |
申请公布号 |
US8842359(B1) |
申请公布日期 |
2014.09.23 |
申请号 |
US201213429091 |
申请日期 |
2012.03.23 |
申请人 |
Silicon Light Machines Corporation |
发明人 |
Payne Alexander;Hunter James |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
Nuttle William |
主权项 |
1. A system comprising:
a spatial light modulator (SLM) assembly including a plurality of one-dimensional (1D) diffractor arrays to modulate light from a light source, the plurality of 1D diffractor arrays integrally formed on a die; illumination optics disposed in a light path between the plurality of 1D diffractor arrays and the light source to illuminate a substantially linear portion of at least one of the plurality of 1D diffractor arrays; and imaging optics disposed in a light path between the SLM assembly and an image plane on a target-substrate, the imaging optics adapted to transmit modulated light from the SLM assembly to a substantially linear portion of the image plane, wherein the SLM assembly comprises a plurality of electrostatically deflectable ribbons supported by support structures above a surface of the die, and wherein the support structures divide each of the plurality of electrostatically deflectable ribbons into regions along a long axis thereof to form the plurality of 1D diffractor arrays. |
地址 |
Sunnyvale CA US |