发明名称 Switching apparatus and test apparatus
摘要 Provided is a switching apparatus comprising a contact point section that includes a first contact point; an actuator that includes a second contact point and moves the second contact point to contact or move away from the first contact point; and a control section that controls a first drive voltage. The actuator includes a first piezoelectric film that expands and contracts according to the first drive voltage and a support layer disposed on the first piezoelectric film. The control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field that is less than a first coercive electric field to a voltage that applies an electric field that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field that is less than a second coercive electric field.
申请公布号 US8841918(B2) 申请公布日期 2014.09.23
申请号 US201113277234 申请日期 2011.10.20
申请人 Advantest Corporation 发明人 Hori Hisao;Abe Yoshikazu;Sato Yoshihiro
分类号 G01R31/02;G01R31/26;G01R1/067;H01H57/00;G01R1/073;H01L41/09 主分类号 G01R31/02
代理机构 代理人
主权项 1. A switching apparatus comprising: a contact point section that includes a first contact point; an actuator that includes a second contact point that can move into contact with and move away from the first contact point, a first piezoelectric film that expands and contracts according to a first drive voltage, a support layer disposed on the first piezoelectric film, and a second piezoelectric film disposed on the support layer that expands and contracts according to a second drive voltage; and a control section that controls the first drive voltage and the second drive voltage, wherein the control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field to the first piezoelectric film that is less than a first coercive electric field to a voltage that applies an electric field to the first piezoelectric film that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field to the first piezoelectric film that is less than a second coercive electric field, and the control section causes the second piezoelectric film to contract by causing a change from a voltage that applies an electric field to the second piezoelectric film that is less than the first coercive electric field to a voltage that applies an electric field to the second piezoelectric film that exceeds the first coercive electric field, and to expand the second piezoelectric film by causing a voltage that applies an electric field to the second piezoelectric film that is less than the second coercive electric field to be output, wherein when moving the second contact point into contact with the first contact point, the control section causes the actuator to bend toward the first piezoelectric film by applying to the first piezoelectric film the first drive voltage causing the first piezoelectric film to contract, and when switching the first contact point and the second contact point from a contact state to a separated state by moving the second contact point away from the first contact point, the control section biases the actuator to return by stopping the supply of the first drive voltage and applying to the second piezoelectric film the second drive voltage causing the second piezoelectric film to contract.
地址 Tokyo JP