PROBE GUIDE PLATE AND METHOD FOR MANUFACTURING THE SAME

摘要

A probe guide plate is provided. The probe guide plate comprises: a substrate having a through hole for guiding a probe, which is formed through the substrate, wherein the substrate comprises a first main surface and a second main surface opposite to the first main surface; and a first insulating film formed on an inner wall of the through hole and on the first and second main surfaces of the substrate such that portions of the first and second main surfaces of the substrate are exposed.