发明名称 |
BONDING MATERIAL, SEMICONDUCTOR DEVICE ARRANGED BY USE THEREOF, WIRING MATERIAL, AND WIRING LINE FOR ELECTRONIC ELEMENT ARRANGED BY USE THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide a bonding material which makes possible to form a bonding layer with a high bonding strength at a low temperature (specifically, 400°C or below), and to provide a semiconductor device arranged by use of the bonding material.SOLUTION: A bonding material comprises 98-90 mass% of Cu nano particles and 2-10 mass% of Ni nano particles to all of metal nano particles. In the bonding material, the metal nano particles having diameters in a range of 1-1000 nm account for 99% or more to the total number of all of the metal particles on a number basis. A semiconductor device comprises a semiconductor element 1, a substrate 2, and a bonding layer 3a, 3b bonding between the semiconductor element and the substrate; the bonding layer is composed of a Cu-Ni mixture layer formed by the bonding material. |
申请公布号 |
JP2014175372(A) |
申请公布日期 |
2014.09.22 |
申请号 |
JP20130044735 |
申请日期 |
2013.03.06 |
申请人 |
TOYOTA CENTRAL R&D LABS INC |
发明人 |
ISHIZAKI TOSHITAKA;SATO TOSHIICHI;AKETO KUNIO |
分类号 |
H01L21/52;B22F1/00;B22F1/02;C22C9/06;H01B1/00;H01B1/22;H01B5/14 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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