| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which is advantageous for quickly and highly accurately measuring the position of a surface to be inspected.SOLUTION: A measurement device 100 for measuring the position of a surface 4 to be inspected includes: a plurality of light sources 1, 2 and 3 for emitting light having different wavelength; a selection part 25 for selecting at least one light among light emitted from the plurality of light sources 1, 2 and 3; a measurement part 27 for irradiating the surface 4 to be inspected and a reference surface 5 with light including the light selected by the selection part 25, and for generating an interference signal by the light reflected by the surface 4 to be inspected and the light reflected by the reference surface 5; and a processing part 26 for determining the position of the surface 4 to be inspected by using the interference signal. |
