| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device advantageous to measure an object with high accuracy in a short time.SOLUTION: The measuring device for measuring an object W by using a gage head projecting and receiving light includes: a movement mechanism for relatively moving the object W and the gage head; and a control section which controls a first measurement for measuring a measuring target surface of the object W in a scanning direction at a predetermined measurement interval while relatively moving the object W and the gage head by the movement mechanism, and a second measurement for measuring a position preceding in the scanning direction to a position measured by the first measurement. The control section changes so as to narrow the measurement interval in the first measurement performed after the second measurement on the basis of a measurement result of the second measurement. |
