| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source device capable of exhibiting superior energy-saving effect for, for example, a crucible for large-size substrate vapor deposition.SOLUTION: There is provided an evaporation source device that has a crucible opening part 3 formed projecting on a crucible body 2 for accommodating a vapor deposition material 1, and includes a main body heating part 4 for heating the crucible body 2 and an opening part heating part 5 for heating the crucible opening part 3. A heating control part is provided which controls the opening part heating part 5 so that the heating start time of the crucible opening part 3 is delayed behind the heating stat time of the crucible body 2 and the crucible opening part 3 begins to be heated before the temperature of the crucible body 2 reaches a fusion temperature or sublimation temperature of the vapor deposition material 1. Consequently, when the temperature of the crucible body 2 reaches the fusion temperature or sublimation temperature of the vapor deposition material 1, the temperature of the crucible opening part 3 reaches the fusion temperature or sublimation temperature of the vapor deposition material 1. |
