发明名称 POLYPHASE AC POWER SUPPLY FOR PLASMA DISCHARGE
摘要 PROBLEM TO BE SOLVED: To provide an ideal polyphase AC power supply having high amplitude and phase symmetry, i.e., high amplitude and phase symmetry where the magnitude of voltage is the same in all phases, and the adjacent phase difference is the same, by controlling a PWM (pulse width modulation) circuit and a phase adjustment circuit digitally.SOLUTION: A DC power supply 1 is connected with n PWM inverters 2, the output of each PWM inverter 2 is connected with n transformers 3, respectively, n discharge electrodes 4 and n waveform detection circuits 5 are connected to the output side of these transformers 3, and the output side of these waveform detection circuits 5 are connected with a PWM control circuit 6.
申请公布号 JP2014176239(A) 申请公布日期 2014.09.22
申请号 JP20130048508 申请日期 2013.03.11
申请人 TOYAMA PREFECTURE;TATEYAMA MACHINE KK;COSEL CO LTD 发明人 SHIMIZU KOJI;ODA SEIJI;NOJIMA NOBUYUKI;MATSUMOTO KAZUNORI;SHIRAISHI NOBUYUKI
分类号 H02M7/493;C23C16/503;H02M7/48 主分类号 H02M7/493
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