| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch mode capacitance type pressure sensor capable of reducing influence of the size and shape of a pressure force body or a depression position to improve measurement accuracy.SOLUTION: A dielectric layer 33 is formed on the upper surface of a fixed electrode 32. A recess 33a is formed on the surface of the dielectric layer 33. An upper substrate 35a is laminated on the surface of the dielectric layer 33 so as to cover the recess 33a. A thin film type conductive diaphragm 35 is arranged above the recess 33a. A projection 39 is provided at the center part of the upper surface of the diaphragm 35. |
