| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pressure transducer which wears well in a heated environment.SOLUTION: A first substrate 210a has a first side surface for accommodating a first diaphragm 110a. The first substrate 210a may also have a second side surface. The second side surface may include a polygon-shaped depression having such a size that a second diaphragm 110b associated with a second substrate 210b is accommodated. The first substrate 210a and first diaphragm 110a may be included in a first assembly 510a, and the second substrate 210b and the second diaphragm 110b may be included in a second assembly 510b. The first assembly 510a and the second assembly 510b may be included in a stack, and at least a portion of the second diaphragm is positioned so as to fit to the inside of the polygon-shaped depression in the stack.</p> |
