| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming a functional thin film of crystalline metal oxide on the particle surface, by spraying a film-forming solution composed of a metal compound dissolved in water or organic solvent onto heat-resistant particles such as fine hollow glass spheres in a heated fluid state so as to continuously cause the dehydration, thermal decomposition, oxidation, crystallization, and the like of the film-forming solution.SOLUTION: The powder 3 to be subject to film formation fed in a fluid bed is heated and fluidized with the air supplied from a blower 7 connected to a heating device 8. The powder 3 to be subject to film formation is spray coated with a film-forming solution supplied from a film-forming solution tank 5 and a film-forming solution supply pump 6 through a spray nozzle 2 disposed above the powder 3 to be subject to film formation with compressed air from an air compressor 4, so as to continuously cause the dehydration, thermal decomposition, oxidation, crystallization, and the like of the film-forming solution. Consequently a functional thin film of metal oxide is formed on the surface of the powder 3 to be subject to film formation. |
