| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing capable of performing high-precision guide by improving fastening rigidity.SOLUTION: A static pressure gas bearing comprises: a movable body 20; and a guide part 10 arranged at a position opposed to the movable body 20. The movable body 20 includes: a first member 21 that is an upper plate made of ceramic; a second member 22 that is a side plate made of ceramic, a fastening member for fastening the upper plate 21 and the side plate 22; and an interposition part provided at an upper end of the side plate 22 and coupling the fastening member with the side plate 22. The fastening member fastens and couples an upper face side of the upper plate 21 with the upper end side of the side plate 22. The interposition part is screwed with the fastening member on an inner face of the interposition part, and screwed with the side plate 22 on the outer face of the interposition part. |
