发明名称 |
SEMICONDUCTOR STRIPS WITH UNDERCUTS AND METHODS FOR FORMING THE SAME |
摘要 |
Provided is an integrated circuit device which includes a semiconductor substrate and a semiconductor strip extended into the semiconductor substrate. A first and a second dielectric region are arranged on the two opposite sides of, and in contact with, the semiconductor strip. Each of the first dielectric region and the second dielectric region includes a first portion whose level is the same with the semiconductor strip, and a second portion whose level is lower than the semiconductor strip. The second portion includes more portions overlapped with the semiconductor strip. |
申请公布号 |
KR20140111934(A) |
申请公布日期 |
2014.09.22 |
申请号 |
KR20130141215 |
申请日期 |
2013.11.20 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUANG TAI CHUN;PENG CHIH TANG;CHANG CHIA WEI;YU MING HUA;LIEN HAO MING;CHEN CHAO CHENG;LEE TZE LIANG |
分类号 |
H01L21/76;H01L21/336 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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