发明名称 SEMICONDUCTOR STRIPS WITH UNDERCUTS AND METHODS FOR FORMING THE SAME
摘要 Provided is an integrated circuit device which includes a semiconductor substrate and a semiconductor strip extended into the semiconductor substrate. A first and a second dielectric region are arranged on the two opposite sides of, and in contact with, the semiconductor strip. Each of the first dielectric region and the second dielectric region includes a first portion whose level is the same with the semiconductor strip, and a second portion whose level is lower than the semiconductor strip. The second portion includes more portions overlapped with the semiconductor strip.
申请公布号 KR20140111934(A) 申请公布日期 2014.09.22
申请号 KR20130141215 申请日期 2013.11.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 HUANG TAI CHUN;PENG CHIH TANG;CHANG CHIA WEI;YU MING HUA;LIEN HAO MING;CHEN CHAO CHENG;LEE TZE LIANG
分类号 H01L21/76;H01L21/336 主分类号 H01L21/76
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